VEGA3 LM

A fully PC controlled SEM with conventional tungsten heated cathode intended both for high vacuum as well as for low vacuum operations. Outstanding optical properties, flicker-free digital image with super clarity, sophisticated user-friendly software for microscope control and image capturing using Windows™ platform, standard formats of stored images, easy image management, processing and measurements, automatic setup of the microscope and many other automated operations are among the characteristic features of the equipment.

 

Analytical Potential:

  • The LM chamber label indicates a large analytical chambere with a fully 5-axis motorized stage
  • 11 chamber interface ports with optimized analytical geometry for EDX, WDX and EBSD
  • First-class YAG scintillator based detectors
  • Selection of optional detectors and accessories
  • Full operating vacuum can be reached within a few minutes with powerful turbomolecular and rotary fore vackuum pumps
  • Investigation of non-conductive samples in the variable pressure mode (LMU) version
  • Several options of chamber suspension type ensure effective reduction of ambient vibrations in the laboratory
  • 3D measurements on a reconstructed surface utilizing 3D metrology software

VEGA3 Configurations

VEGA3 LMH
A large chamber model with extended motorized manipulator operating at high vacuum suitable for wide range of applications where conductive materials are investigated.

VEGA3 LMU
A variable pressure SEM that supplements all the advantages of the high vacuum model with an extended facility for low-vacuum operations, enabling the investigation of non-conductive specimens in their natural, uncoated state.

Standard:

  • Measurement
  • Image Processing
  • 3D Scanning
  • Hardness
  • Multi Image Calibrator
  • Object Area
  • Switch-Off Timer
  • Tolerance
  • Positioner
  • Live Video
  • EasySEMTM

Optional:

  • Particles Basic
  • Particles Advanced
  • Sample Observer
  • Image Snapper
  • DrawBeam Basic
  • DrawBeam Advanced
  • EasyEDX Integration Software
  • Input Director
  • TESCAN TRACE GSR
  • 3D Metrology (MeX)
  • System Examiner
  • Cell Counter

Electron Optics:

Electron Gun:

Tungsten heated cathode / optionally LaB6

Resolution:
High Vacuum Mode (SE): 3 nm at 30 kV / 2 nm at 30 kV
8 nm at 3 kV / 5 nm at 3 kV
Low Vacuum Mode (BSE, LVSTD): 3.5 nm at 30 kV / 2.5 nm at 30 kV
Magnification:

2x – 1,000,000x
(for 5’’ image width in Continual Wide Field/Resolution)

Maximum Field of View:

7.7 mm at WDanalytical 10 mm
24 mm at WD 30 mm

Accelerating Voltage:

200 V to 30 kV

Probe Current:

1 pA to 2 µA

Electron Optics Working Modes:
Resolution: High-resolution mode
Depth: Sets the column up in a mode that enhances depth of focus
Field: Optimizes the column to provide a large non-distorted field of view
Wide Field: Provides an extra-large non-distorted field of view for extra low magnification imaging
Channeling: Working mode for assessment of crystal orientation data of the specimen, acquiring of electron channeling pattern (ECP)

Available modes in low vacuum are Resolution and Depth.

Scanning:

Scanning Speed:

From 20 ns to 10 ms per pixel adjustable in steps or continuously

Scanning Features:

Point & Line Scan
Focus Window – shape, size and position continuously adjustable
Dynamic Focus – in plane or folded plane tilted up to ±70 deg
Image rotation, Image shift, Tilt compensation
3D Beam –defined tilting scanning axis around XY axis
Live Stereoscopic Imaging
Other scanning shapes available through the optional DrawBeam software

Vacuum System:

Chamber Vacuum:
High Vacuum Mode: < 9x10-3 Pa* (with Tungsten heated cathode/LaB6)
Medium Vacuum Mode: 3 – 150 Pa (with Tungsten heated cathode)
Low Vacuum Mode: 3 – 500 Pa** (with Tungsten heated cathode/LaB6)
Optional: 3 – 2000 Pa** (with Tungsten heated cathode/LaB6)
Gun Vacuum:

for LaB6: < 3x10-5 Pa

Column Vacuum:

< 9x10-3 Pa*

Pumping Time after Specimen Exchange:
High Vacuum Mode: typically < 3,5 minutes
Medium Vacuum Mode: typically < 3 minutes
Low Vacuum Mode: typically < 3 minutes

* pressure < 510-4 Pa reachable, optional vacuum gauge needed (on request)

** with low vacuum aperture inserted

Chamber:

Internal diameter:

230 mm

Door:

148 mm

Number of ports:

11+

+ configuration and number of ports can be modified to customer’s needs

Chamber Suspension:
Standard: Pneumatic
Optional: Mechanic (rubber elements) – not available with LaB6 option
Active vibration isolation (integrated)

Specimen Stage:

Type:

Compucentric, fully motorized

Movements:

X = 80 mm (–40 mm to +40 mm)
Y = 60 mm (–30 mm to +30 mm)
Z = 47 mm

Rotation: 360° continuous
Tilt: –80° to +80° (WD and sample size dependent)

Maximum Specimen Height:

81 mm (without rotation stage)
60 mm ( with rotation stage)

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