VEGA3 SB - EasyProbe

The VEGA3 SBU - EasyProbe is a compact scanning electron microscope (SEM) fully integrated with a selected energy dispersive X-ray microanalyser (EDX). Superior imaging quality, high level of automation, easy usage and quick quantitative elemental results directly in the live image are among the characteristic features of the instrument. A variable pressure vacuum system allows investigation of non-conductive samples in their natural uncoated state.

Key Features of VEGA3 SB - EASYPROBE

  • Fully integrated EDX microanalyser for automatic quantitative elemental analysis
  • Original EasySEM software interface with One-Touch EDX toolbox

Microscope Control:

The EasySEM control interface is an easy-to-use mode of the main SEM control software. It is optimized for the use with a touchscreen. The EasySEM allows all basic imaging functions and a One-Touch EDX analysis toolbox, both with a great support of background automatics. When the One-Touch EDX tool is activated, the system automatically returns result of a quantitative elemental analysis of the area pointed in the live SEM image. The system allows advanced microscope control in three levels of user expertise. Control by the keyboard, the mouse and the trackball or optionally by the Control panel is available via the VegaTC control software using the Windows™ platform

Software extensions:

Standard:

  • Measurement
  • Image Processing
  • 3D Scanning
  • Hardness
  • Multi Image Calibrator
  • Object Area
  • Switch-Off Timer
  • Tolerance
  • Live Video
  • EasySEMTM
  • EasyEDX Integration Software

Optional:

  • Particles Basic
  • Sample Observer
  • 3D Metrology (MeX)
  • System Examiner

Electron Optics:

Electron Gun:

Tungsten heated cathode

Resolution:
High Vacuum Mode (SE):  3 nm at 30 kV
8 nm at 3 kV
Low Vacuum Mode (BSE): 3.5 nm at 30 kV
Magnification:

3x – 1,000,000x
(for 5’’ image width in Continual Wide Field/Resolution)

Maximum Field of View:

7.7 mm at WDanalytical 10 mm
24 mm at WD 30 mm

Accelerating Voltage:

200 V to 30 kV

Probe Current:

1 pA to 2 µA

Electron Optics Working Modes:
Resolution: High-resolution mode
Depth: Sets the column up in a mode that enhances depth of focus
Field: Optimizes the column to provide a large non-distorted field of view
Wide Field: Provides an extra-large non-distorted field of view for extra low magnification imaging
Channeling: Working mode for assessment of crystal orientation data of the specimen, acquiring of electron channeling pattern (ECP)

Scanning:

Scanning Speed:

From 20 ns to 10 ms per pixel adjustable in steps or continuously

Scanning Features:

Point & Line Scan
Focus Window – shape, size and position continuously adjustable
Dynamic Focus – in plane or folded plane tilted up to ±70 deg
Image rotation, Image shift, Tilt compensation
3D Beam –defined tilting scanning axis around XY axis
Live Stereoscopic Imaging
Other scanning shapes available through the optional DrawBeam software

Vacuum System:

Chamber Vacuum:
High Vacuum Mode: < 9x10-3 Pa*
Medium Vacuum Mode: 3 – 150 Pa
Low Vacuum Mode: 3 – 500 Pa**
Column Vacuum:

< 9x10-3 Pa*

Pumping Time after Specimen Exchange:

typically < 3 minutes

* pressure < 5x10-4 Pa reachable, optional vacuum gauge needed (on request)

** with low vacuum aperture inserted

Chamber:

Internal diameter:

160 mm

Door:

120 mm

Number of ports:

10

Chamber Suspension:

Mechanical – by means of rubber elements

Specimen Stage:

Type:

Eucentric

Movements:

3-axis motorized
X = 45 mm – motorized*
Y = 45 mm – motorized*
Z = 27 mm – manual
Z'= 6 mm – manual

Rotation: 360° continuous – motorized*
Tilt: –90° to +90° – manual

* relative movements only, without position readout

Note: Range of the movements can be dependent on WD and configuration

Maximum Specimen Height:

36 mm

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