A fully PC controlled SEM with conventional tungsten heated cathode intended both for high vacuum as well as for low vacuum operations. Outstanding optical properties, flicker-free digital image with super clarity, sophisticated user-friendly software for microscope control and image capturing using Windows™ platform, standard formats of stored images, easy image management, processing and measurements, automatic setup of the microscope and many other automated operations are among the characteristic features of the equipment.


Analytical Potential

  • The SB chamber is equipped with a 3-axis motorized stage
  • First-class YAG scintillator-based detectors
  • 10 chamber interface ports with optimized analytical geometry for e.g. EDX, EBSD, EBIC
  • Selection of optional detectors and accessories
  • Full operating vacuum can be reached within a few minutes with powerful turbomolecular and rotary fore vacuum pumps.
  • Investigation of non-conductive samples in the variable pressure mode (SBU) version
  • 3D measurements on a reconstructed surface utilizing 3D metrology software

VEGA3 Configurations

A high vacuum model of SEM with 3-axis motorized stage for investigation of small conductive samples.

A variable pressure SEM that supplements all the advantages of the high vacuum model with the extended facility for low-vacuum operations, enabling the investigation of non-conductive specimens in their natural uncoated state.

VEGA3 SB - EasyProbe
The EasyProbe is a favorable package of a scanning electron microscope fully integrated with a selected EDX microanalyser. EasyProbe is available in both high vacuum and variable pressure variants. The system is delivered with a touch screen.

Software extensions:


  • Measurement
  • Image Processing
  • 3D Scanning
  • Hardness
  • Multi Image Calibrator
  • Object Area
  • Switch-Off Timer
  • Tolerance
  • Positioner*
  • Live Video
  • EasySEMTM


  • Particles Basic
  • Particles Advanced*
  • Sample Observer
  • Image Snapper*
  • DrawBeam Basic
  • DrawBeam Advanced
  • EasyEDX Integration Software
  • Input Director
  • 3D Metrology (MeX)
  • System Examiner
  • Cell Counter

* only possible with optional position readout stage

Electron Optics:

Electron Gun: Tungsten heated cathode
High Vacuum Mode (SE):  3 nm at 30 kV
8 nm at 3 kV
Low Vacuum Mode (BSE, LVSTD): 3.5 nm at 30 kV

3x – 1,000,000x
(for 5’’ image width in Continual Wide Field/Resolution)

Maximum Field of View:

7.7 mm at WDanalytical 10 mm
24 mm at WD 30 mm

Accelerating Voltage:

200 V to 30 kV

Probe Current:

1 pA to 2 µA

Electron Optics Working Modes:
Resolution: High-resolution mode
Depth: Sets the column up in a mode that enhances depth of focus
Field: Optimizes the column to provide a large non-distorted field of view
Wide Field: Provides an extra-large non-distorted field of view for extra low magnification imaging
Channeling: Working mode for assessment of crystal orientation data of the specimen, acquiring of electron channeling pattern (ECP)


Scanning Speed:

From 20 ns to 10 ms per pixel adjustable in steps or continuously

Scanning Features:

Point & Line Scan
Focus Window – shape, size and position continuously adjustable
Dynamic Focus – in plane or folded plane tilted up to ±70 deg
Image rotation, Image shift, Tilt compensation
3D Beam –defined tilting scanning axis around XY axis
Live Stereoscopic Imaging
Other scanning shapes available through the optional DrawBeam software

Vacuum System:

Chamber Vacuum:
High Vacuum Mode: < 9x10-3 Pa*
Medium Vacuum Mode: 3 – 150 Pa
Low Vacuum Mode: 3 – 500 Pa**
Column Vacuum:

< 9x10-3 Pa*

Pumping Time after Specimen Exchange:

typically < 3 minutes

* pressure < 5x10-4 Pa reachable, optional vacuum gauge needed (on request)

** with low vacuum aperture inserted


Internal diameter:

160 mm


120 mm

Number of ports:


Specimen Stage:




Standard: 3-axis motorized
X = 45 mm – motorized*
Y = 45 mm – motorized*
Z = 27 mm – manual
Z'= 6 mm – manual

Rotation: 360° continuous – motorized*
Tilt: –90° to +90° – manual

* relative movements only, without position readout

Maximum Specimen Height:

36 mm

* relative movements only, without position readout

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