A fully PC controlled FE-SEM – for high vacuum as well as for low vacuum operations. Outstanding optical properties, flicker-free digital image with super clarity. Sophisticated user-friendly software for microscope control and image capturing using Windows™ platform. Standard formats of stored images, easy image management, processing and measurements, automatic set up of the microscope and many other automated operations are characteristic features of the equipment.


Analytical Potential

  • XM MIRA chamber provide superior specimen handling using a full 5-axis motorized compucentric stage and ideal geometry for EDX and EBSD
  • Numerous interface ports with optimized analytical geometry for EDX, WDX and EBSD as well as for attaching many other detectors
  • First-class YAG scintillator-based detectors
  • Selection of optional detectors and accessories
  • Full operating vacuum can be obtained quickly and easily with powerful turbomolecular and dry fore vacuum pumps, electron gun pumping with an ion pump
  • Investigation of non-conductive samples in variable pressure mode versions, excellent results in the investigation of magnetic samples
  • Several options for chamber suspension type ensure effective reduction of ambient vibrations in the laboratory

MIRA3 Configurations

A high vacuum model is suitable for a wide range of applications where extra large conductive samples are investigated.

A variable pressure variant that supplements all the advantages of the high vacuum model with extended facility for low vacuum operations. This allows investigation of non-conductive materials in their natural uncoated state.

Microscope Control

All microscope functions are controlled by keyboard, mouse and trackball via the program MiraTC using Windows™ platform.


  • Measurement
  • Image Processing
  • 3D Scanning
  • Hardness
  • Multi Image Calibrator
  • Object Area
  • Switch-Off Timer
  • Tolerance
  • Scriptor
  • Positioner
  • Live Video
  • EasySEM™


  • Particles Basic
  • Particles Advanced
  • Sample Observer
  • Image Snapper
  • DrawBeam Basic
  • DrawBeam Advanced
  • EasyEDX Integration Software
  • Input Director
  • 3D Metrology (MeX)
  • System Examinertions 

Electron Optics:

Electron Gun:

High brightness Schottky emitter

Resolution in High Vacuum Mode (SE): 1.2 nm at 30 kV
1.5 nm at 15 kV
2.5 nm at 3 kV
4.5 nm at 1 kV
In-Beam SE (option): 1.0 nm at 30 kV
1.2 nm at 15 kV
2.0 nm at 3 kV
3.5 nm at 1 kV
BD mode (option): 1.5 nm at 3 kV
1.8 nm at 1 kV
2.5 nm at 200 V
STEM detector (option): 0.8 nm at 30 kV
In-Beam BSE (option): 2.0 nm at 15 kV
Resolution in Low Vacuum Mode (LVSTD): 1.5 nm at 30 kV
3 nm at 3 kV
Resolution BSE: 2 nm at 30 kV

at 30kV: 1x– 1,000,000x
(for 5’’ image width in Continual Wide Field / Resolution mode)

Maximum Field of View:

6.4 mm at WDanalytical 10 mm
20 mm at WD 30 mm

Accelerating Voltage:

200 V to 30 kV / 50 V to 30 kV with BDT option

Probe Current:

2 pA to 200 nA

Electron Optics Working Modes:
Resolution: High-resolution mode
Depth: Sets the column up in a mode that enhances depth of focus
Field: Optimizes the column to provide a large non-distorted field of view
Wide Field: Provides an extra-large non-distorted field of view for extra low magnification imaging
Channelling: Working mode for assessment of crystal orientation data of the specimen, acquiring of electron channelling pattern (ECP)

Available modes in low vacuum are Resolution and Depth.


Scanning Speed:

From 20 ns to 10 ms per pixel adjustable in steps or continuously

Scanning Features:

Point & Line Scan
Focus Window – shape, size and position continuously adjustable
Dynamic Focus – in plane tilted up to ±70 deg
Image rotation, Image shift, Tilt compensation
3D Beam –defined tilting scanning axis around XY axis
Live Stereoscopic Imaging
Other scanning shapes available through the optional DrawBeam software

Vacuum System:

Chamber Vacuum:
High Vacuum Mode: < 9x10-3 Pa*
Low Vacuum Mode: 7 – 500 Pa**
Gun Vacuum:

< 3x10-7 Pa

Pumping Time after Specimen Exchange:

typically < 3.5 minutes

* pressure < 5x10-4 Pa reachable
** with low vacuum aperture inserted


Internal diameter:

285 mm (width) x 340 mm (depth)


285 mm (width) x 320 mm (height)

Number of ports:


+ configuration and number of ports can be modified to customer´s needs

Chamber Suspension:
Standard: Pneumatic
Optional: Active vibration isolation (integrated)

Specimen Stage:


Compucentric, fully motorized


X = 130 mm (–50 mm to +80 mm)
Y = 130 mm (–65 mm to +65 mm)
Z = 100 mm

Rotation: 360° continuous
Tilt: –30° to +90°

Note: Range of the movements can be dependent on WD and configuration.

Maximum Specimen Height:

98 mm (with BDT rotation stage)
116 mm (with rotation stage)
145 mm (without rotation stage)

Chamber and stage optional: Extended chamber
  Extended chamber with modified Y-movement

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