A fully PC controlled FE SEM intended for both – for high vacuum as well as for low vacuum operations. Outstanding optical properties, flicker-free digital image with super clarity. Sophisticated user-friendly software for microscope control and image capturing using Windows™ platform, standard formats of stored images, enhanced image archiving, processing and measurements, automatic set up of the microscope and many other automated operations are characteristic features of the equipment.


Analytical Potential

  • LM MIRA chamber provides superior specimen handling using a full 5-axis motorized compucentric stage and ideal geometry for EDX and EBSD.
  • Numerous interface ports with optimized analytical geometry for EDX, WDX and EBSD as well as for attaching many other detectors
  • First-class YAG scintillator-based detectors
  • Selection of optional detectors and accessories
  • Full operating vacuum can be obtained quickly and easily with powerful turbomolecular and dry fore vacuum pumps, electron gun pumping with an ion pump
  • Investigation of non-conductive samples in variable pressure mode versions, excellent results in the investigation of magnetic samples
  • Several options for chamber suspension type ensure effective reduction of ambient vibrations in the laboratory.

MIRA3 Configurations

This large-chamber model with an extended motorized manipulator operates at high vacuum for the investigation of conductive samples with extraordinary imaging quality.

This variable-pressure FE SEM supplements all the advantages of the high vacuum model with extended facilities for low vacuum operation, enabling the investigation of non-conductive specimens in their natural uncoated state.

Microscope Control

All microscope functions are controlled by keyboard, mouse and trackball via the program MiraTC using Windows™ platform.


  • Measurement
  • Image Processing
  • 3D Scanning
  • Hardness
  • Multi Image Calibrator
  • Object Area
  • Switch-Off Timer
  • Tolerance
  • Scriptor
  • Positioner
  • Live Video
  • EasySEM™


  • Particles Basic
  • Particles Advanced
  • Sample Observer
  • Image Snapper
  • DrawBeam Basic
  • DrawBeam Advanced
  • EasyEDX Integration Software
  • Input Director
  • 3D Metrology (MeX)
  • System Examinertions 

Electron Optics:

Electron Gun:

High brightness Schottky emitter

Resolution in High Vacuum Mode (SE): 1.2 nm at 30 kV
1.5 nm at 15 kV
2.5 nm at   3 kV
4.5 nm at   1 kV

 In-Beam SE (option):

1 nm at 30 kV
1.2 nm at 15 kV
2 nm at 3 kV
3.5 nm at 1 kV
Resolution in Low Vacuum Mode (LVSTD): 1.5 nm at 30 kV
3 nm at 3 kV
Resolution (BSE): 2 nm at 30 kV

at 30 kV: 2x – 1,000,000x
(for 5’’ image width in Continual Wide Field / Resolution mode)

Maximum Field of View:

6.4 mm at WDanalytical 10 mm
20 mm at WD 30 mm

Accelerating Voltage:

200 V to 30 kV / 50 V to 30 kV with BDT option

Probe Current:

2 pA to 200 nA

Electron Optics Working Modes:
Resolution high-resolution mode
Depth sets the column up in a mode that enhances depth of focus
Field optimizes the column to provide a large non-distorted field of view
Wide Field provides an extra large non-distorted field of view for extra low magnification imaging
Channelling working mode for assessment of crystal orientation data of the specimen, acquiring of electron channelling pattern (ECP)

In low vacuum mode Resolution and Depth mode available


Scanning Speed:

from 20 ns to 10 ms per pixel adjustable in steps or continuously

Scanning Features:

Point & Line Scan
Focus Window – shape, size and position continuously adjustable
Dynamic Focus – in plane tilted up to ±70 deg
Image rotation, Image shift, Tilt compensation
3D Beam –defined tilting scanning axis around XY axis
Live Stereoscopic Imaging
Other scanning shapes available through the optional DrawBeam software

Vacuum System:

Chamber Vacuum:
Chamber / High vacuum mode: < 9x10-3 Pa*
Chamber / Low vacuum mode: 7 – 500 Pa
Gun vacuum: < 3x10-7 Pa

* - pressure < 5x10-4 Pa reachable

Pumping Time after Specimen Exchange:

typically < 3 minutes


Internal diameter:

230 mm


Door Width 148 mm

Number of ports:


+ configuration and number of ports can be modified to customers’ needs.

Chamber Suspension:

Standard: pneumatic
Optional: active vibration isolation system (integrated)

Specimen Stage:


compucentric, fully motorized


X = 80 mm (–40 mm to +40 mm)
Y = 60 mm (–30 mm to +30 mm)
Z = 47 mm

Rotation: 360° continuous
Tilt: –80° to +80°

Maximum Specimen Height:

50 mm (with BDT rotation stage)
60 mm (with rotation stage)
81 mm (without rotation stage)

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