LYRA3 GM

A fully PC controlled SEM with Schottky field emission cathode in combination with gallium Focused Ion Beam (FIB) column and optionally with Gas Injection System (GIS). Oustanding optical properties, flicker-free digital image with super clarity, sophisticated user-friendly software for SEM/FIB/GIS control and image capturing using Windows platform, standard formats of stored images, easy image management, processing and measurements, automatic set up of the system and many other automated operations are characteristic features of the equipment.

 

Analytical Potential

  • High brightness Schottky emitter for high-resolution / high-current / low-noise imaging
  • Extraordinary resolution with powerful optional In-Beam SE Detector
  • Unique three-lens Wide Field Optics™ design offering the variety of working and displaying modes embodying the TESCAN proprietary Intermediate Lens (IML) for the beam aperture optimization
  • Real time In-Flight Beam Tracing™ for the performance and beam optimization integrating the well-established software Electron Optical Design. It includes also direct and continual control of beam spot size and beam current
  • Fast imaging rate
  • Beam Deceleration Technology (BDT) for excellent resolution at low beam voltages (optional)
  • In-Beam BSE Detector for BSE imaging at very short working distances (optional) suitable even for ferromagnetic samples imaging
  • High-throughput large-area automation, e.g. automated particle location and analysis
  • Superior specimen handling using a motorized compucentric stage
  • Ideal geometry for EDX and EBSD; non-distorted EBSD pattern
  • Fast and easy obtaining of the clean chamber vacuum by powerful turbomolecular and dry fore vacuum pump; electron gun pumping by ion getter pump
  • Fully automated microscope setup including electron optics setup and alignment
  • Network operations and built-in remote access/diagnostics, all come as the TESCAN standard
  • Unique live stereoscopic imaging utilizing the 3D Beam Technology
  • Extended low vacuum mode with chamber pressure up to 500 Pa for non-conducting specimens imaging
  • Unique ion optic column differentially pumped (2 ion getter pumps) for ultra-low ion scattering effect
  • Motorized aperture changer in ion column with ultra-high reproducibility
  • Beam Blanker and Faraday cup included as standard accessories for ion column
  • Ultra-high resolution and excellent performance at high current with optional Cobra column
  • Automatic FIB cutting and signal acquiring followed by 3D reconstruction (tomography), allowing 3D EBSD, 3D EBIC etc. with integrated 3D visualization
  • Sophisticated software for SEM/FIB/GIS control, image acquisition, archiving, processing and analysis; multi-user environment localized in many languages

LYRA3 Configurations

The GM configurations extend their analytical capabilities, providing the capability to perform fine sample surface observation and modification even with extra-large specimens.

LYRA3 GMH
These extra-large chamber models with compucentric motorized manipulators operate at high vacuum for the investigation of conductive samples with extraordinary imaging quality.

LYRA3 GMU
These variable pressure SEM models supplement all the advantages of the high-vacuum model with an extended facility for low-vacuum operations, enabling the investigation of non-conductive specimens in their natural uncoated state.

Software extensions:

All microscope functions are controlled by keyboard, mouse and trackball via the program LyraTC using Windows™ platform.

Standard:

  • Measurement
  • Image Processing
  • 3D Scanning
  • Hardness
  • Multi Image Calibrator
  • Object Area
  • Switch-Off Timer
  • Tolerance
  • Scriptor
  • Positioner
  • Live Video
  • DrawBeam Basic
  • EasySEMTM

Optional:

  • Particles Basic
  • Particles Advanced
  • Sample Observer
  • Image Snapper
  • DrawBeam Advanced
  • Input Director
  • TESCAN TRACE GSR
  • 3D Metrology (MeX)
  • 3D Tomography
  • System Examiner

Electron Optics:

Electron Gun:

High brightness Schottky emitter

Resolution:
Resolution in High Vacuum Mode (SE): 1.2 nm at 30 kV
1.5 nm at 15 kV
2.5 nm at 3 kV
4.5 nm at 1 kV
In-Beam SE (option): 1.0 nm at 30 kV
1.2 nm at 15 kV
2.2 nm at 3 kV
4.0 nm at 1 kV
BD mode (option): 1.8 nm at 3 kV
2.0 nm at 1 kV
3.5 nm at 200 V
STEM detector (option): 0.9 nm at 30 kV
In-Beam BSE (option): 2 nm at 15 kV
Resolution in Low Vacuum Mode (LVSTD): 1.5 nm at 30 kV
3 nm at 3 kV
Resolution BSE: 2 nm at 30 kV
Magnification:

at 30 kV: 1x– 1,000,000x
(for 5’’ image width in Continual Wide Field / Resolution mode)

Maximum Field of View:

6.0 mm at WDanalytical 9 mm
17 mm at WD 30 mm

Accelerating Voltage:

200 V to 30 kV / 50 V to 30 kV with BDT option

Probe Current:

2 pA to 200 nA

Electron Optics Working Modes:
Resolution: High-resolution mode
Depth: Sets the column up in a mode that enhances depth of focus
Field: Optimizes the column to provide a large non-distorted field of view
Wide Field: Provides an extra-large non-distorted field of view for extra low magnification imaging
Channeling: Working mode for assessment of crystal orientation data of the specimen, acquiring of electron channeling pattern (ECP)

Available modes in low vacuum are Resolution and Depth.

Scanning:

Scanning Speed:

From 20 ns to 10 ms per pixel adjustable in steps or continuously

Scanning Features:

Point & Line Scan
Focus Window – shape, size and position continuously adjustable
Dynamic Focus – in plane or folded plane tilted up to ±70 deg
Image rotation, Image shift, Tilt compensation
3D Beam – defined tilting scanning axis around XY axis
Live Stereoscopic Imaging
Other scanning shapes available through the DrawBeam software

Ion Optics:

Ion column:

Canion / Cobra

Resolution:

<5 nm at 30 kV / <2.5 nm at 30 kV
(at SEM-FIB coincidence point)

Magnification:

minimum 150x at coincidence point and 10 kV (corresponding to 1 mm view field), maximum 1,000,000x

Accelerating Voltage:

0.5 kV to 30 kV

Ion Gun:

Ga Liquid Metal Ion Source

Probe Current:

1 pA to 40 nA / 1 pA to 50 nA

SEM-FIB Coincidence at:

WD 9 mm for SEM - WD 12 mm for FIB

SEM-FIB angle: 55°

Vacuum System:

Chamber Vacuum:
High Vacuum Mode: < 9x10-3 Pa*
Low Vacuum Mode:  7 – 500 Pa**
Gun Vacuum:

< 3x10-7 Pa

FIB gun Vacuum:

< 5x10-6 Pa

Pumping Time after Specimen Exchange:

typically < 3.5 minutes

* pressure < 5x10-4 Pa reachable
** with low vacuum aperture inserted

Chamber:

Internal diameter:

340 mm (width) x 315 mm (depth)

Door:

340 mm (width) x 320 mm (height)

Number of ports:

20+
+ configuration and number of ports can be modified to customer’s needs

Chamber Suspension:

Standard: active vibration isolation (integrated)

Specimen Stage:

Type:

Compucentric, fully motorized

Movements:

X = 130 mm (–65 mm to +65 mm)
Y = 130 mm (–65 mm to +65 mm)
Z = 100 mm

Rotation: 360° continuous
Tilt: –60° to +90°

Note: Range of the movements can be dependent on WD and configuration.

Maximum Specimen Height:

92 mm (with BDT rotation stage)
110 mm (with rotation stage)
139 mm (without rotation stage)

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