A fully PC controlled SEM with Schottky field emission cathode in combination with gallium Focused Ion Beam (FIB) column and optionally with Gas Injection System (GIS). Outstanding optical properties, flicker-free digital image with super clarity, sophisticated user-friendly software for SEM/FIB/GIS control and image capturing using Windows™ platform, standard formats of stored images, easy image management, processing and measurements, automatic set up of the system and many other automated operations are characteristic features of the equipment.


Analytical Potential

  • XM chamber model provides superior specimen handling using a full 5-axis motorized compucentric stage and ideal geometry for EDX and EBSD
  • Option of extra-large XM chamber with robust stage able to accommodate large samples
  • Numerous interface ports with optimized analytical geometry for EDX, WDX and EBSD as well as for attaching many other detectors
  • First-class YAG scintillator-based detectors
  • Selection of optional detectors and accessories
  • Full operating vacuum can be obtained quickly and easily
  • Investigation of non-conductive samples in variable pressure mode versions, favorable conditions for the investigation of magnetic samples, non-distorted EBSD pattern compared to immersion magnetic lenses
  • Integrated active vibration isolation ensures effective reduction of ambient vibrations in the laboratory.

LYRA3 Configurations

The XM configurations extend their analytical capabilities, providing the capability to perform fine sample surface observation and modification even with extra-large specimens.

These extra-large chamber models with compucentric motorized manipulators operate at high vacuum for the investigation of conductive samples with extraordinary imaging quality.

These variable pressure SEM models supplement all the advantages of the high-vacuum model with an extended facility for low-vacuum operations, enabling the investigation of non-conductive specimens in their natural uncoated state.

Software extensions:

All microscope functions are controlled by keyboard, mouse and trackball via the program LyraTC using Windows™ platform.


  • Measurement
  • Image Processing
  • 3D Scanning
  • Hardness
  • Multi Image Calibrator
  • Object Area
  • Switch-Off Timer
  • Tolerance
  • Scriptor
  • Positioner
  • Live Video
  • DrawBeam Basic
  • EasySEMTM


  • Particles Basic
  • Particles Advanced
  • Sample Observer
  • Image Snapper
  • DrawBeam Advanced
  • Input Director
  • 3D Metrology (MeX)
  • 3D Tomography
  • System Examiner

Electron Optics:

Electron Gun:

High brightness Schottky emitter

Resolution in High Vacuum Mode (SE): 1.2 nm at 30 kV
1.5 nm at 15 kV
2.5 nm at 3 kV
4.5 nm at 1 kV
In-Beam SE (option): 1.0 nm at 30 kV
1.2 nm at 15 kV
2.2 nm at 3 kV
4.0 nm at 1 kV
BD mode (option): 1.8 nm at 3 kV
2.0 nm at 1 kV
3.5 nm at 200 V
STEM detector (option): 0.9 nm at 30 kV
In-Beam BSE (option): 2 nm at 15 kV
Resolution in Low Vacuum Mode (LVSTD): 1.5 nm at 30 kV
3 nm at 3 kV
Resolution BSE: 2 nm at 30 kV

at 30kV: 1x– 1,000,000x
(for 5’’ image width in Continual Wide Field / Resolution mode)

Maximum Field of View:

6.0 mm at WDanalytical 9 mm
17 mm at WD 30 mm

Accelerating Voltage:

200 V to 30 kV  / 50 V to 30 kV with BDT option

Probe Current:

2 pA to 200 nA

Electron Optics Working Modes:
Resolution: High-resolution mode
Depth: Sets the column up in a mode that enhances depth of focus
Field: Optimizes the column to provide a large non-distorted field of view
Wide Field: Provides an extra-large non-distorted field of view for extra low magnification imaging
Channeling: Working mode for assessment of crystal orientation data of the specimen, acquiring of electron channeling pattern (ECP)

Available modes in low vacuum are Resolution and Depth.


Scanning Speed:

From 20 ns to 10 ms per pixel adjustable in steps or continuously

Scanning Features:

Point & Line Scan
Focus Window – shape, size and position continuously adjustable
Dynamic Focus – in plane or folded plane tilted up to ±70 deg
Image rotation, Image shift, Tilt compensation
3D Beam – defined tilting scanning axis around XY axis
Live Stereoscopic Imaging
Other scanning shapes available through the DrawBeam software

Ion Optics:

Ion column:

Canion / Cobra


<5 nm at 30 kV / <2.5 nm at 30 kV
(at SEM-FIB coincidence point)


minimum 150x at coincidence point and 10 kV (corresponding to 1 mm view field), maximum 1,000,000x

Accelerating Voltage:

0.5 kV to 30 kV

Ion Gun:

Ga Liquid Metal Ion Source

Probe Current:

1 pA to 40 nA / 1 pA to 50 nA

SEM-FIB Coincidence at:

WD 9 mm for SEM - WD 12 mm for FIB

SEM-FIB angle: 55°

Vacuum System:

Chamber Vacuum:
High Vacuum Mode: < 9x10-3 Pa*
Low Vacuum Mode: 7 – 500 Pa**
Gun Vacuum:

< 3x10-7 Pa

FIB gun Vacuum:

< 5x10-6 Pa

Pumping Time after Specimen Exchange:

typically < 3.5 minutes

* pressure < 5x10-4 Pa reachable
** with low vacuum aperture inserted


Internal diameter:

285 mm (width) x 340 mm (depth)


285 mm (width) x 320 mm (height)

Number of ports:

+ configuration and number of ports can be modified to customer’s needs

Chamber Suspension:

Standard: active vibration isolation (integrated)

Specimen Stage:


Compucentric, fully motorized


X = 130 mm (–65 mm to +65 mm)
Y = 130 mm (–65 mm to +65 mm)
Z = 100 mm

Rotation: 360° continuous
Tilt: –30° to +90°

Note: Range of the movements can be dependent on WD and configuration.

Maximum Specimen Height:

92 mm (with BDT rotation stage)
110 mm (with rotation stage)
139 mm (without rotation stage)

Chamber and stage optional: Extended chamber
  Extended chamber with modified Y-movement

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